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AFM Probe Model: AIOAl |
| application: |
Several Measurement Modes |
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| general: |
Rotated Monolithic Silicon Probe
Symmetric Tip Shape
Chipsize: 3.4 x 1.6 x 0.3 mm |
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| coating: |
Aluminium reflex coating,
30 nm thick |
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technical
data: |
This probe uses “on scan angle” symmetric tips to provide
a more symmetric representation of features over 200 nm. |
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 The All-in-One probes offer four cantilevers with different geometry for all topography measurement modes: contact mode, force modulation, soft tapping and tapping mode. The resonance frequencies and force constants are similar to the ones of the well-established models ContAl, Multi75Al, Tap150Al-G and Tap300Al.
The long cantilevers A for contact mode and B for force modulation are located at one end of the chip while the short cantilevers C for soft tapping and D for tapping mode are located at the opposite end. The short cantilever end is marked by a trapezoidal pattern visible with bare eyes. |
| Cantilever |
Application |
Similar to |
Short specs
(typical values) |
| A |
Contact Mode |
ContAl |
Res. Frequency: 15 kHz |
Force Constant:
0.2 N/m |
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| All-In-One Probe, Cantilever A Specs |
| Resonant Frequency |
Typical Values |
Range |
| 15 kHz |
+/- 5 kHz |
| Force Constant |
0.2 N/m |
0.04 – 0.7 N/m |
| Resonant Frequency and Force Constant Similar to |
ContAl |
| Cantilever Length |
500 μm |
+/- 10 μm |
| Mean Width |
30 μm |
+/- 5 μm |
| Thickness |
2.7 μm |
+/- 1 μm |
| Tip Height |
17 μm |
+/- 2 μm |
| Tip Set Back |
15 μm |
+/- 5 μm |
| Tip Radius |
< 10 nm |
| Coating |
none |
| Half Cone Angle |
20º - 25º along cantilever axis, 25º - 30º from side, 10º at the apex |
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| B |
Force modulation, Pulsed Force Mode |
Multi75Al |
Res. Frequency:
80 kHz |
Force Constant:
2.7 N/m |
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| All-In-One Probe, Cantilever B Specs |
| Resonant Frequency |
Typical Values |
Range |
| 80 kHz |
+/- 30 kHz |
| Force Constant |
2.7 N/m |
0.4 - 10 N/m |
| Resonant Frequency and Force Constant Similar to |
Multi75Al |
| Cantilever Length |
210 μm |
+/- 10 μm |
| Mean Width |
30 μm |
+/- 5 μm |
| Thickness |
2.7 μm |
+/- 1 μm |
| Tip Height |
17 μm |
+/- 2 μm |
| Tip Set Back |
15 μm |
+/- 5 μm |
| Tip Radius |
< 10 nm |
| Coating |
none |
| Half Cone Angle |
20º - 25º along cantilever axis, 25º - 30º from side, 10º at the apex |
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| C |
Soft Tapping Mode, Intermittent Contact-Mode |
Tap150Al-G |
Res. Frequency:
150 kHz |
Force Constant:
7.4 N/m |
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| All-In-One Probe, Cantilever C Specs |
| Resonant Frequency |
Typical Values |
Range |
| 150 kHz |
+/- 80 kHz |
| Force Constant |
7.4 N/m |
1 - 29 N/m |
| Resonant Frequency and Force Constant Similar to |
Tap150Al-G |
| Cantilever Length |
150 μm |
+/- 10 μm |
| Mean Width |
30 μm |
+/- 5 μm |
| Thickness |
2.7 μm |
+/- 1 μm |
| Tip Height |
17 μm |
+/- 2 μm |
| Tip Set Back |
15 μm |
+/- 5 μm |
| Tip Radius |
< 10 nm |
| Coating |
none |
| Half Cone Angle |
20º - 25º along cantilever axis, 25º - 30º from side, 10º at the apex |
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| D |
Tapping Mode, Intermittent Contact-Mode |
Tap300Al |
Res. Frequency:
350 kHz |
Force Constant:
40 N/m |
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| All-In-One Probe, Cantilever D Specs |
| Resonant Frequency |
Typical Values |
Range |
| 350 kHz |
+/- 150 kHz |
| Force Constant |
40 N/m |
7 - 160 N/m |
| Resonant Frequency and Force Constant Similar to |
Tap300Al |
| Cantilever Length |
100 μm |
+/- 10 μm |
| Mean Width |
50 μm |
+/- 5 μm |
| Thickness |
2.7 μm |
+/- 1 μm |
| Tip Height |
17 μm |
+/- 2 μm |
| Tip Set Back |
15 μm |
+/- 5 μm |
| Tip Radius |
< 10 nm |
| Coating |
none |
| Half Cone Angle |
20º - 25º along cantilever axis, 25º - 30º from side, 10º at the apex |
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